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PVD技术磁控溅射技术电子束蒸发DLCHIPIMSPACVDCVD

电子束蒸发
电子束蒸发法是真空蒸发镀膜的一种方式,它是在钨丝蒸发的基础上发展起来的。在真空条件下利用电子束进行直接加热蒸发材料,使蒸发材料气化并向基板输运,在基底上凝结形成薄膜的方法。在电子束加热装置中,被加热的物质放置于水冷的坩埚中,可避免蒸发材料与坩埚壁发生反应影响薄膜的质量,因此,电子束蒸发沉积法可以制备高纯薄膜,同时在同一蒸发沉积装置中可以安置多个坩埚,实现同时或分别蒸发,沉积多种不同的物质。通过电子束蒸发,任何材料都可以被蒸发。电子束是一种高速的电子流。电子束蒸发是目前真空镀膜技术中一种成熟且主要的镀膜方法,它解决了电阻加热方式中膜料与蒸镀源材料直接接触容易互混的问题。


Electron beam evaporation

Electron beam evaporation is a method of vacuum evaporation coating, which is developed on the basis of tungsten wire evaporation. The evaporation material is directly heated by electron beam under vacuum condition to vaporize and transport to the substrate, and then condense on the substrate to form a thin film. In the electron beam heating device, the heated material is placed in a water-cooled crucible, which can avoid the reaction between the evaporation material and the crucible wall and affect the quality of the film. Therefore, the electron beam evaporation deposition method can prepare high-purity film, and at the same time, multiple crucibles can be placed in the same evaporation deposition device to realize simultaneous or separate evaporation and deposition of a variety of different substances. Any material can be evaporated by electron beam evaporation. Electron beam is a kind of high-speed electron flow. At present, electron beam evaporation is a mature and main coating method in vacuum coating technology. It solves the problem of direct contact and easy mixing between coating material and evaporation source material in resistance heating mode.

电子束蒸发
带有纵向光束扫描的车身
带有喷枪的系统,以及用于较厚层的单,多口袋和大容量坩埚的全数字光束扫掠仪。
带有坩埚转塔系统的定制电子枪震源,用于特殊应用,并延长了震源维护之间的产品时间。


Electron beam evaporation

Body with longitudinal beam scanning

The system with spray gun and full digital beam sweeper for single, multi pocket and large capacity crucible in thick layer.

Custom gun source with crucible turret system for special applications and extended product time between source maintenance.

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离子辅助蒸发(IAD)
离子源技术可为光子学和光电子学领域的应用提供更低的工艺温度,更短的工艺时间以及增强的薄膜性能。
优点:
电子束蒸发可以蒸发高熔点材料,比一般电阻加热蒸发热效率高、 束流密度大、蒸发速度快,制成的薄膜纯度高、质 量好,厚度可以较准确地控制,可以广泛应用于制备高纯薄膜和导电玻璃等各种光学材料薄膜。电子束蒸发的特点是不会或很少覆盖在目标三维结构的两侧,通常只会沉积在目标表面。这是电子束蒸发和溅射的区别。
应用:
常见于半导体科研工业领域。利用加速后的电子能量打击材料标靶,使材料标靶蒸发升腾。最终沉积到目标上。


Ion assisted evaporation (IAD)

Ion source technology can provide lower process temperature, shorter process time and enhanced film performance for Photonics and optoelectronics applications.

advantage:

Electron beam evaporation can evaporate high melting point materials, which has higher thermal efficiency, higher beam density and faster evaporation speed than ordinary resistance heating evaporation. The prepared films have high purity, good quality, and can be controlled accurately. It can be widely used to prepare high-purity films, conductive glass and other optical materials.

The characteristic of electron beam evaporation is that it does not or rarely covers both sides of the target three-dimensional structure, and usually only deposits on the target surface. This is the difference between electron beam evaporation and sputtering.

Application:

It is commonly used in semiconductor research and industry. The accelerated electron energy is used to strike the material target and make it evaporate. Finally, it's deposited on the target.


致诚科技系列电子束蒸发光学镀膜机采用先进电子枪蒸发、离子辅助沉积技术(IAD),提供用于精密光学,光电和半导体领域的薄膜沉积和蚀刻。
从介质膜系和金属膜,到TCO膜及其他化合物,都可以按照客户需求进行设计,制备具有优异的厚度均匀性以及最严格的光学,机械和环境可靠性能的产品。
致诚科技为您提供完整的解决方案,包括平台上的工艺和基板治具,并具有验证的生产可靠性,以及最佳的成本优势。

Using advanced electron gun evaporation and ion assisted deposition (IAD) technology, Zhicheng Technology Series electron beam evaporation optical coating machine provides film deposition and etching for precision optics, optoelectronics and semiconductor fields.

From dielectric film and metal film, to TCO film and other compounds, we can design according to customers' requirements, and prepare products with excellent thickness uniformity and the strictest optical, mechanical and environmental reliability.

Zhicheng Technology provides you with complete solutions, including process and substrate fixture on the platform, with proven production reliability and the best cost advantage.

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