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1. Winding system
The winding system is mainly composed of unwinding rollers, winding rollers, coating drums, guide rollers, tension measurement (control) rollers, flattening rollers and resistance test rollers driven by DC motors. After the tension transports the substrate film to the coating area for coating, the coated substrate film is wound into a roll film. By controlling the process parameters such as film winding speed, tension and angle of flattening rollers, wrinkles can be avoided and neatly wound film rolls can be obtained.
2. Speed control and tension control
Speed control: The constant linear speed of the strip substrate is the first condition to ensure uniform film thickness. Most of the speed control of the strip in the winding system adopts constant speed control mainly based on current control, and the speed can be set in advance and automatically adjusted according to the requirements of the product.
Tension Control: Film tension control is a critical issue in web coating equipment. Tension control is related to the phenomenon of deviation, tendon breaking and wrinkling of the film.
3. The evaporation system is composed of evaporation source holder (electrode), evaporation source, wire feeding mechanism and so on.
4. The opening mechanism of the vacuum chamber of PVD coating equipment: the opening mechanism of a large double-chamber semi-continuous evaporation coating machine is generally composed of a vacuum chamber body, a winding mechanism, a large sealing plate, a power cabinet, a travel switch and a trolley. According to the width of the coating base material, determine whether the single door or the double door is opened. The vacuum chamber of the common roll-to-roll coating machine is mostly opened with a single door, and the evaporator is still in the coating chamber.
5. Shielding component: It is to shield the uncoated stripes or textures on the film. This is a special requirement for the capacitor film. The shielding pattern of the ordinary capacitor extends along the longitudinal direction of the base film, and the shielding stripes of the safety capacitor film It is reticulate.
6. Vacuum coating machine system: In general, the winding chamber and the coating chamber of the winding coating equipment have a set of independent vacuum pumps. Usually, the main pump of the evaporation chamber of the vacuum pumping system used by domestic and foreign roll-to-roll coating machines is a measuring and reporting diffusion pump, and the main pump of the winding chamber is a high-speed oil diffusion jet pump.
When the buyer purchases the vacuum coating machine, the manufacturer Shengchang equipment will generally be equipped with a machine maintenance manual. Both the buyer and the manufacturer attach great importance to the maintenance of the vacuum coating machine.
If the pressure is not low enough (or the vacuum degree is not high enough), good results cannot be obtained. For example, if aluminum is deposited on the order of 10 2 Torr, the obtained film is not only not bright, but even gray and black. And the mechanical strength is extremely poor.
Thin film deposition technology is mainly divided into three major processes: physical, chemical, and epitaxy. Physical vapor deposition is referred to as PVD vacuum coating machine. Chemical vapor deposition is referred to as CVD coating machine for short.
In the vacuum chamber, when the particle concentration in the gas phase and the pressure of the residual gas are low enough, these particles can keep flying in a straight line from the evaporation source to the substrate, otherwise, they will collide and change the direction of motion.
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