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The maintenance of the vacuum coating machine is a very important topic. When the buyer purchases the vacuum coating machine back, the manufacturer Shengchang equipment will generally be equipped with a machine maintenance manual. For machines with relatively high process requirements, employees will be arranged for on-site service, because it can be seen , both the purchaser and the manufacturer attach great importance to the maintenance of the vacuum coating machine.
The following is a detailed introduction to the maintenance skills of the vacuum coating machine:
1. Before restarting the diffusion pump, pay attention to leak detection.
The diffusion pump has been used continuously for more than 6 months, and the pumping speed is obviously slowed down, or the operation is improper. Fill the air, remove the connecting water pipe, remove the electric stove, unscrew the first-stage nozzle, and clean the pump cavity and pump liner with gasoline first. Once again, wash it again with washing powder mixed with water, and then clean it with clean water*. After the water evaporates and dries up, install the pump liner, add new diffusion pump oil, and put it back into the body, connect the water pipes, and install the electric hob. You can reboot.
The method is: start the maintenance pump, close the door, and observe whether the vacuum degree of the diffusion pump part reaches 6X10 Pa after a few minutes, otherwise, perform leak detection. Check whether the sealing rubber ring is installed at the joint, or the sealing ring is crushed. It can be heated only after the hidden danger of air leakage is eliminated, otherwise the diffusion pump oil will burn and cannot enter the working state.
2. When the rough pump (slide valve pump, rotary vane pump) works continuously for one month (half in the rainy season), it needs to be replaced with new oil.
The method is: unscrew the oil drain bolt, drain the old oil, and then start the pump for a few seconds to completely discharge the old oil in the pump. Screw back the oil drain bolt and add new oil to the rated amount (observed by the oil sight glass). If it has been used continuously for more than half a year, the oil cap should be opened when changing the oil, and the dirt in the tank should be wiped clean with a cloth.
3. Every time the vacuum coating equipment completes more than 200 coating procedures, the studio should be cleaned once.
The method is: repeatedly scrub the inner wall of the vacuum chamber with a saturated solution of caustic soda (NaOH), (note that the human skin cannot directly contact the caustic soda solution to avoid burns). The layer falls off, and hydrogen gas is released. Then clean the vacuum chamber with clean water and clean the dirt in the fine extraction valve with a cloth dipped in gasoline.
The above are several common maintenance methods after the use of the vacuum coating machine. The daily maintenance of the machine is indispensable. Everyone must master the maintenance skills to improve the company's production capacity and reduce costs.
When the buyer purchases the vacuum coating machine, the manufacturer Shengchang equipment will generally be equipped with a machine maintenance manual. Both the buyer and the manufacturer attach great importance to the maintenance of the vacuum coating machine.
If the pressure is not low enough (or the vacuum degree is not high enough), good results cannot be obtained. For example, if aluminum is deposited on the order of 10 2 Torr, the obtained film is not only not bright, but even gray and black. And the mechanical strength is extremely poor.
Thin film deposition technology is mainly divided into three major processes: physical, chemical, and epitaxy. Physical vapor deposition is referred to as PVD vacuum coating machine. Chemical vapor deposition is referred to as CVD coating machine for short.
In the vacuum chamber, when the particle concentration in the gas phase and the pressure of the residual gas are low enough, these particles can keep flying in a straight line from the evaporation source to the substrate, otherwise, they will collide and change the direction of motion.
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