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PACVD is also called PECVD (ion enhanced vapor deposition)
PACVD ion enhanced chemical vapor deposition (ICVD) is a kind of amorphous diamond cemented carbide coating with extremely smooth and good adhesion under the condition of high vacuum and temperature below 200 ℃. Compared with PVD process, PACVD process uses deep plating power supply, without cathode target and workpiece rotation in furnace. This process is clean, pollution-free, reliable and multi-performance coating process.
PACVD ion enhanced chemical vapor deposition (ICVD) is a kind of amorphous diamond cemented carbide coating with extremely smooth and good adhesion under the condition of high vacuum and temperature below 200 ℃.
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